Alacant: Modeling of glow discharge sputtering systems

Published: 1 January 1988| Version 1 | DOI: 10.17632/h5w7vpv5t7.1
Contributor:
Isabel Abril

Description

Abstract The FORTRAN 77 program ALACANT models in one spatial dimension the charge exchange and ionisation processes that take place in the cathode fall region in a glow discharge and the transport of sputtered material through the plasma region to the substrate. Outputs include electric field, the extent of the dark space, flux energy distributions, current densities, target etching yield, target erosion rate and deposition rate at the substrate. Title of program: ALACANT Catalogue Id: ABFC_v1_0 Nature of problem This program treats the charge-exchange and ionization processes that take place in the region of spatial charge or cathode fall region in a glow discharge and the transport of sputtered matter through the plasma region to the substrate. We calculate self-consistently the electric field in the cathode fall region, the extent of the dark space, the flux energy distributions of energetic particles (ions, neutrals and electrons), the current density of ions and electrons in the cathode fall region, ... Versions of this program held in the CPC repository in Mendeley Data ABFC_v1_0; ALACANT; 10.1016/0010-4655(88)90154-3 This program has been imported from the CPC Program Library held at Queen's University Belfast (1969-2019)

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